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MicroDAC deformation measurement on microelectronic products

 
: Vogel, D.; Bombach, C.; Großer, V.; Michel, B.

Jüptner, W.; Osten, W.:
Fringe '97. Proceedings of the 3rd International Workshop on Automatic Processing of Fringe Patterns
Berlin: Akademie-Verlag, 1997 (Akademie-Verlag series in optical metrology 3)
ISBN: 3-05-501791-9
International Workshop on Automatic Processing of Fringe Patterns (Fringe) <3, 1997, Bremen>
English
Conference Paper
Fraunhofer IZM ()

: http://publica.fraunhofer.de/documents/PX-23912.html