Micro-structuring with Nd:YAG-lasers

Laser Beam removal with Nd:YAG-lasers is a manufacturing method to produce 3-dimensional micro-structures with the precision of a few micrometers. Many materials such as ceramics and hard metals can be processed by focused Nd:YAG-laser radiation. With this technology tools for micro-embossing and micro-stamping can be produced to decrease the manufacturing costs for micro-parts. First micro-tools and the equipment (handling, laser source, CAD/CAM software) as well as the potential of micro-embossing and -stamping are described.