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Micro-structuring with Nd:YAG-lasers

: Gillner, A.; Hellrung, D.; Poprawe, R.

Geiger, M. ; International Institution for Production Engineering Research -CIRP-, Paris:
Laser assisted net shape engineering 2. Proceedings of the 30th International CIRP Seminar on Manufacturing Systems, LANE 1997 : Erlangen, September 23 - 26, 1997
Bamberg: Meisenbach, 1997
ISBN: 3-87525-090-7
pp.561-569 : Ill., Lit.
LANE <2, 1997, Erlangen>
International CIRP Seminar on Manufacturing Systems <30, 1997, Erlangen>
Conference Paper
Fraunhofer ILT ()
hard metal; laser; micro structure; micro technology; tool

Laser Beam removal with Nd:YAG-lasers is a manufacturing method to produce 3-dimensional micro-structures with the precision of a few micrometers. Many materials such as ceramics and hard metals can be processed by focused Nd:YAG-laser radiation. With this technology tools for micro-embossing and micro-stamping can be produced to decrease the manufacturing costs for micro-parts. First micro-tools and the equipment (handling, laser source, CAD/CAM software) as well as the potential of micro-embossing and -stamping are described.