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Micro-opto-mechanical beam deflectors

: Glöckner, S.; Göring, R.; Possner, T.


Optical engineering 36 (1997), No.5, pp.1339-1345
ISSN: 0091-3286
ISSN: 0036-1860
Journal Article
Fraunhofer IOF ()
micro-optical switches; micro-optics; micro-opto-electro-mechanical system; optical scanner; piezoelectric actuator

The utilization of micro-optical components in systems for optical-beam deflection and modulation offers the possibility for realization of miniaturized switches and scanners. As the required displacement of the micro-optical components for efficient beam manipulation is quite small, high speed actuators with small electrical power consumption can be used. We present a variety of micro-optical configurations and discuss their potential for the creation of different types of miniaturized scanners and switches. The combination of micro-optical components already available and semiclassical piezoelectric actuators leads to new types of switching and modulation systems for a very broad spectrum of applications.