English
Deutsch
Log In
Password Login
or
Log in with Fraunhofer Smartcard
Research Outputs
Projects
Researchers
Institutes
Statistics
Fraunhofer-Gesellschaft
Home
Fraunhofer-Gesellschaft
Konferenzschrift
Manufacture of 3D structures for micro systems with advanced shadow casting lithography
Details
Full
Export
Statistics
Options
1994
Conference Paper
Titel
Manufacture of 3D structures for micro systems with advanced shadow casting lithography
Author(s)
Cullmann, E.
Löchel, B.
Engelmann, G.
Hauptwerk
Micro-system technologies '94
Konferenz
International Conference on Micro Electro, Opto, Mechanic Systems and Components 1994
Language
English
google-scholar
View Details
Fraunhofer-Institut fĂĽr Siliziumtechnologie ISIT