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Magnetron activated deposition MAD process
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1995
Journal Article
Title
Magnetron activated deposition MAD process
Author(s)
Reschke, J.
Goedicke, K.
Schiller, S.
Journal
Surface and coatings technology
Conference
International Conference on Metallurgical Coatings and Thin films 1995
DOI
10.1016/0257-8972(95)02625-8
Language
English
Fraunhofer-Institut für Organische Elektronik, Elektronenstrahl- und Plasmatechnik FEP
