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Magnetron activated deposition MAD process

 
: Reschke, J.; Goedicke, K.; Schiller, S.

:

Surface and coatings technology 76/77 (1995), pp.763-769
ISSN: 0257-8972
International Conference on Metallurgical Coatings and Thin films <22, 1995, San Diego>
English
Conference Paper
Fraunhofer FEP ()

: http://publica.fraunhofer.de/documents/PX-22640.html