1994
Conference Paper
Title

Magnetically driven microstructures fabricated with multilayer electroplating

Title Supplement
Siehe auch: Sensors and Actuators, A 46/47(1995), S.98-103.
Author(s)
Löchel, B.
Maciossek, A.
Wagner, B.
Engelmann, G.
Quenzer, H.J.
Mainwork
Conference
Language
English