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1993
Conference Paper
Titel
Luminescent porous silicon investigated by accelerator analytics
Abstract
Electroluminescent nanoporous silicon is investigated by accelerator techniques. Rutherford Backscattering Spectroscopy (RBS) and Nuclear Reaction Analysis (NRA) are used to measure the oxygen content. The stoichiometry is Sisub1Osub1.8 in the top layer and Sisub1Osub0.8 in 6 mym depth. Channeling experiments show that only very weak channels are present.