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  4. Low-temperature surface passivation of silicon solar cells by means of a TMCTS oxide
 
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1994
Conference Paper
Title

Low-temperature surface passivation of silicon solar cells by means of a TMCTS oxide

Abstract
In this paper the possibility of low-temperature surface passivation by means of a Tetra-Methyl-Cyclo-Tetra-Siloxane (TMCTS) LPCVD oxide is investigated. The influence of the oxide deposition parameters on the surface passivation quality is studied. The lowest surface recombination velocity S is obtained for oxides grown at 600°C and 300 mTorr: S = 207 cm/s on 100 omega cm p-type silicon, and S = 667 cm/s on 1 omega cm p-type material. It is shown that these results are further improved by annealing at temperatures above 700°C. After a 30' anneal at 850°C in an Ar atmosphere, the surface recombination velocity is reduced to 11.4 cm/s on 100 omega cm samples and 24.9 cm/s on 1 omega cm samples. These values are lower than the ones measured for high-quality thermal oxides grown on the same material. Capacitance-voltage measurements show that this is related to the presence of a high positive charge in the TMCTS oxide (Q(ind f) = 1.1 10(exp 12) cm-2), and a relatively small interface state density (D(ind it) = 2.4 10(exp 10) eV(exp -1) cm-2). LPCVD oxides are also very useful to simplify the high-efficiency solar cell proces. Preliminary current-voltage characteristics are given for simple solar cells, in which a TMCTS oxide is also used as an antireflection coating, and in which P-doped and B-doped TMCTS oxides are used as doping sources for the emitter and BSF region.
Author(s)
Demesmaeker, E.
Glunz, Stefan W.  
Knobloch, Jens
Wettling, Wolfram
Mainwork
12th European PV Solar Energy Conference '94. Proceedings  
Conference
European PV Solar Energy Conference 1994  
Language
English
Fraunhofer-Institut für Solare Energiesysteme ISE  
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