• English
  • Deutsch
  • Log In
    Password Login
    Research Outputs
    Fundings & Projects
    Researchers
    Institutes
    Statistics
Repository logo
Fraunhofer-Gesellschaft
  1. Home
  2. Fraunhofer-Gesellschaft
  3. Artikel
  4. Low temperature silicon wafer bonding
 
  • Details
  • Full
Options
1992
Journal Article
Title

Low temperature silicon wafer bonding

Author(s)
Benecke, W.
Quenzer, H.J.
Journal
Sensors and Actuators. A  
Conference
Eurosensors 1991  
Language
English
Fraunhofer-Institut für Siliziumtechnologie ISIT  
  • Cookie settings
  • Imprint
  • Privacy policy
  • Api
  • Contact
© 2024