Publica
Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten. Low temperature silicon wafer bonding
| Sensors and Actuators. A 32 (1992), No.1-3, pp.340-344
ISSN: 0924-4247 |
| Eurosensors <5, 1991, Rom> |
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| English |
| Conference Paper |
| Fraunhofer ISIT () |