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Low temperature PVD for hard coating of dielectric materials
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1995
Conference Paper
Titel
Low temperature PVD for hard coating of dielectric materials
Author(s)
Leonhardt, G.
Falz, M.
Kuhn, M.
Lunow, T.
Lopez, E.
Wilberg, R.
Scheibe, H.J.
Hauptwerk
Society of Vacuum Coaters. 38th Annual Technical Conference 1995. Proceedings
Konferenz
Society of Vacuum Coaters (Annual Technical Conference) 1995
Language
English
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Fraunhofer-Institut für Werkstoff- und Strahltechnik IWS