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Low temperature PVD for hard coating of dielectric materials

 

Society of Vacuum Coaters. 38th Annual Technical Conference 1995. Proceedings
1995
pp.317-321
Society of Vacuum Coaters (Annual Technical Conference) <38, 1995, Chicago>
English
Conference Paper
Fraunhofer IWS ()

: http://publica.fraunhofer.de/documents/PX-22498.html