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Low-temperature bonding using intermetallic phases
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1997
Conference Paper
Titel
Low-temperature bonding using intermetallic phases
Author(s)
Petersen, B.-C.
Harder, T.
Hauptwerk
11th European Microelectronics Conference 1997. Proceedings
Konferenz
European Microelectronics Conference 1997
Language
English
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Fraunhofer-Institut für Siliziumtechnologie ISIT