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Low loss singlemode optical waveguides with large cross-section in silicon-on-insulator

: Schmidtchen, J.; Splett, A.; Schüppert, B.; Petermann, K.; Burbach, G.


Electronics Letters 27 (1991), No.16, pp.1486-1488
ISSN: 0013-5194
Journal Article
Fraunhofer IMS ()
optical waveguides; optoelectronics; SIMOX; SOI; waveguide

The realisation of singlemode rib waveguides in silicon-on-insulator (SOI) having a width and height of several micrometres is reported. Measurements at a wavelength of 1x3 and 1x55fm yield waveguide losses below 0x5dB/cm and an excellent agreement of the near field intensity distribution with the one predicted by a BPM simulation.