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1991
Conference Paper
Title
Low-drift gas sensor with on-chip instrumentation
Abstract
Although results on CMOS compatible gas sensors have been published during the recent years, non of them have had on-chip electronic circuitry. In this work a hydrogen gas sensor device with an on-chip switched capacitor (SC) readout circuit is presented. This technique enables AC operation of capacitive gas sensors. It has been shown that this type of operation gives an improvement of long term behaviour of the sensor.