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1991
Conference Paper
Title

Low-drift gas sensor with on-chip instrumentation

Abstract
Although results on CMOS compatible gas sensors have been published during the recent years, non of them have had on-chip electronic circuitry. In this work a hydrogen gas sensor device with an on-chip switched capacitor (SC) readout circuit is presented. This technique enables AC operation of capacitive gas sensors. It has been shown that this type of operation gives an improvement of long term behaviour of the sensor.
Author(s)
Dura, H.-G.
Hosticka, B.J.
Mokwa, W.
Schöneberg, U.
Mainwork
Transducers '91. 6th International Conference on Solid-State Sensors and Actuators. Digest of technical papers  
Conference
International Conference on Solid-State Sensors and Actuators 1991  
Language
English
Fraunhofer-Institut für Mikroelektronische Schaltungen und Systeme IMS  
Keyword(s)
  • hydrogen sensor

  • integrated sensor

  • low-drift

  • on-chip instrumentation

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