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Low-drift gas sensor with on-chip instrumentation

: Dura, H.-G.; Hosticka, B.J.; Mokwa, W.; Schöneberg, U.

Institute of Electrical and Electronics Engineers -IEEE-:
Transducers '91. 6th International Conference on Solid-State Sensors and Actuators. Digest of technical papers
New York/N.Y., 1991
ISBN: 0-87942-585-7
International Conference on Solid-State Sensors and Actuators <6, 1991, San Francisco/Calif.>
Conference Paper
Fraunhofer IMS ()
hydrogen sensor; integrated sensor; low-drift; on-chip instrumentation

Although results on CMOS compatible gas sensors have been published during the recent years, non of them have had on-chip electronic circuitry. In this work a hydrogen gas sensor device with an on-chip switched capacitor (SC) readout circuit is presented. This technique enables AC operation of capacitive gas sensors. It has been shown that this type of operation gives an improvement of long term behaviour of the sensor.