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Laser-recrystallized polycristalline silicon resistors for integrated circuits application
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1983
Journal Article
Title
Laser-recrystallized polycristalline silicon resistors for integrated circuits application
Author(s)
Schaber, H.
Cutter, D.
Obermeier, E.
Binder, J.
Journal
Journal of applied physics
Language
English
IFT
Keyword(s)
integration
Laserannealing
Polysilizium
Rekristallisation