Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.

Laser recrystallization for three-dimensional integration

 

MIEL '89
1989
MIEL <1989, Nis>
English
Conference Paper
Fraunhofer IFT; 2000 dem IZM eingegliedert
3D-Integration; entrainment; Kristallisation; laser; Polysilizium; SOI; substrate damage; Substratschaden

Abstract
Ar laser recrystallization of polycrystalline silicon-on-insulator layers for 3-dimensional integration is discussed. Attention is given to geometry and composition of anti-reflection stripes as well as to recrystallization conditions preventing substrate damage. Functioning devices both in the substrate and in the top layer have been fabricated.

: http://publica.fraunhofer.de/documents/PX-21594.html