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Laser pulse vapour deposition of metal-carbon superlattices for soft X-ray mirror applications

Laserimpuls-Gasphasenabscheidung von Metall-Kohlenstoff Übergitter zur Verwendung der Spiegel für weiche Röntgenstrahlung

: Dietsch, R.; Mai, H.; Pompe, W.; Schöneich, B.; Völlmar, S.; Hopfe, S.; Scholz, R.; Wehner, B.; Weißbrodt, P.; Wendrock, H.

	Mordike, B.L. ; Wissenschaftlicher Arbeitskreis Laser-Technik; Deutsche Gesellschaft für Materialkunde e.V. -DGM-, Oberursel; Deutscher Verband für Schweißtechnik e.V. -DVS-, Düsseldorf; Arbeitsgemeinschaft Wärmebehandlung und Werkstofftechnik e.V. -AWT-: Laser treatment of materials. Papers presented at the European Conference on Laser Treatment of Materials 1992 Oberursel: DGM-Informationsgesellschaft, 1992 ISBN: 3-88355-185-6 pp.479-484 : Abb.,Lit.
	European Conference on Laser Treatment of Materials (ECLAT) <4, 1992, Göttingen>

	English
	Conference Paper
	Fraunhofer IWS ()
	Bildverarbeitung; dünne Schicht; Ellipsometrie; ellipsometry; image processing; laser ablation; Ni/C multilayer structure; Ni/C-Multischicht; plasma source; Plasmaquelle; Röntgenbeugung; Röntgenspiegel; SNMS depth profiling; SNMS-Tiefenprofilanalyse; TEM-cross-section; thin films; UHV-Abscheideeinrichtung; UHV-deposition equipment; x-ray diffraction; X-ray mirror

Abstract
The paper describes first results wiht a new designed target/substrate/handling system for LPVD of multilayer structures with a good thickness homogenity. Resulting thickness profiles calculated for various handling regimes show a substantial thickness homogeneization as compared to the conventional arrangement. For the preparation of various thin solid films (C, Ni) and C/Ni-multilayers a Nd-YAG-laser (wavelength 1064 nm, pulse energy 0.9 J, pulse length 7 ns, repetition rate 30 Hz) was used. The layers were characterized by ellipsometry, X-ray diffraction, TEM cross-section.