Laser pulse vapour deposition of metal-carbon superlattices for soft X-ray mirror applications

The paper describes first results wiht a new designed target/substrate/handling system for LPVD of multilayer structures with a good thickness homogenity. Resulting thickness profiles calculated for various handling regimes show a substantial thickness homogeneization as compared to the conventional arrangement. For the preparation of various thin solid films (C, Ni) and C/Ni-multilayers a Nd-YAG-laser (wavelength 1064 nm, pulse energy 0.9 J, pulse length 7 ns, repetition rate 30 Hz) was used. The layers were characterized by ellipsometry, X-ray diffraction, TEM cross-section.