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1995
Journal Article
Titel
Laser machining of Si3N4 ceramics
Alternative
Laserbearbeitung von Si3N4-Keramiken
Abstract
Laser machining of ceramics is a promising alternative to diamond-based techniques. Technological problems and influencing factors are exemplified for the structural shaping of silicon nitride ceramics using Nd:YAG pulses of several hundred microseconds. Ablation rate and ablation geometry are discussed in relation to irradiation conditions and microstructures.