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Laser conditioning of LaF3/MgF2 dielectric coatings for excimer lasers

: Kaiser, N.; Anton, B.; Jänchen, H.; Mann, K.; Eva, E.; Fischer, C.; Henking, R.; Ristau, D.; Weißbrodt, P.; Mademann, D.; Raupach, L.; Hacker, E.

Bennett, H.E.; Guenther, A.H. ; Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.:
Laser-Induced Damage in Optical Materials 1994. Proceedings
Bellingham, WA: SPIE, 1995 (Proceedings of SPIE 2428)
ISBN: 0-8194-1776-9
Annual Boulder Damage Symposium <26, 1994, Boulder/Colo.>
Annual Symposium on Optical Materials for High-Power Lasers <26, 1994, Boulder/Colo.>
Conference Paper
Fraunhofer IOF ()
Dünne optische Schicht; excimer laser optics; Excimer-Laser-Optik; fluoride thin films; Fluoridschicht; laser induced damage threshold; Laserzerstörschwelle; optical coating; optical thin films; oxide thin films; Oxidschicht; ultraviolet spectral region; ultravioletter Spektralbereich; UV

LaF3/MgF2 -dielectric thin film combinations can be applied in optics for wavelengths down to 150 nm. Several such HR systems for a wavelength of 248 nm were investigated. In these coatings, the influence of laser conditioning on damage threshold and absorptivity was found to be remarkable. XPS- and TEM-investigations showed that the conditioning effect is related to structural and stoichiometric changes in the multilayers, especially in the near-surface-sublayers.