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Laser beam removal of micro-structures with Nd:YAG-lasers

: Hellrung, D.; Gillner, A.; Poprawe, R.

Beckmann, L.H.J.F. ; European Optical Society -EOS-:
Lasers in material processing
Bellingham, Wash.: SPIE, 1997 (Europto series)
ISBN: 0-8194-2517-6
pp.267-273 : Ill., Lit.
Conference on Lasers in Material Processing <1997, München>
Conference Paper
Fraunhofer ILT ()
hard metal; laser; micro structure; micro technology; tool

Laser beam removal with Nd:YAG-lasers is a manufacturing method to produce microstructures with the precision of a few micrometers. Because many materials can be structured with laser radiation, especially hard metals and ceramics, it is a very flexible technology for the production of tools for micro-embossing and micro-stamping. The combination of the laser and stamping technology offers the possibility to produce high quantities of micro-parts at moderate costs. A system for laser beam removal existing of a handling with a CAD/CAM coupling and a diode pumped solid state laser was developed and in several investigations the quality of these micro-tools was tested.