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  4. Laser beam removal of micro-structures with Nd:YAG-lasers
 
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1997
Conference Paper
Title

Laser beam removal of micro-structures with Nd:YAG-lasers

Abstract
Laser beam removal with Nd:YAG-lasers is a manufacturing method to produce microstructures with the precision of a few micrometers. Because many materials can be structured with laser radiation, especially hard metals and ceramics, it is a very flexible technology for the production of tools for micro-embossing and micro-stamping. The combination of the laser and stamping technology offers the possibility to produce high quantities of micro-parts at moderate costs. A system for laser beam removal existing of a handling with a CAD/CAM coupling and a diode pumped solid state laser was developed and in several investigations the quality of these micro-tools was tested.
Author(s)
Hellrung, D.
Gillner, A.
Poprawe, R.
Mainwork
Lasers in material processing  
Conference
Conference on Lasers in Material Processing 1997  
Language
English
Fraunhofer-Institut für Lasertechnik ILT  
Keyword(s)
  • hard metal

  • laser

  • micro structure

  • micro technology

  • tool

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