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Large area pulsed laser deposition of ceramic films

: Kreutz, E.W.; Backes, G.; Mertin, M.


Surface and coatings technology 97 (1997), pp.435-441 : Ill., Lit.
ISSN: 0257-8972
Journal Article
Fraunhofer ILT ()
ceramic; large area coverage; pulsed laser deposition

Large area pulsed laser deposition of alumina on stainless steel with Ar or Ar/O2 mixtures as processing gas in investigated using excimer laser radiation. The high area coveraging was achieved by a simultaneous movement of target and substrate in combination with the use of a certain power density distribution achieving a special angular distribution of the vapour/plasma plume. The chemical properties of the films were studied by X-ray photoelectron spectroscopy, and the morphology and uniformness by optical microscopy and ellipsometry.