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Ionic properties in plasma generated by XeCl laser ablation process

: Brcka, J.; Kreutz, E.W.; Voss, A.

Elektrotechnicky casopis 43 (1992), No.4, pp.118-121 : Abb.,Lit.
ISSN: 0013-578X
Journal Article
Fraunhofer ILT ()
ablation; anisotropic; ceramic capillary; chamber; excimer laser; interaction; ionic property

The paper deals with ionic properties in plasma generated by an excimer laser XeC1 during ablation process of an A 1203 target. By means of an electrical probe the ion density in the plasma plume was determined and the ion velocity and the time of flight (TOF) were measured. Presented results are consistent with optical measurements.