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Ion implantation into semiconductors

Historical perspectives
 
: Ryssel, H.

Ghibaudo, G.:
Effect of disorder and defects in ion-implanted semiconductors. Electrical and physiochemical characterization
San Diego: Academic Press, 1997 (Semiconductors and Semimetals 45)
ISBN: 0-12-752145-3
English
Book Article
Fraunhofer IIS B ( IISB) ()

: http://publica.fraunhofer.de/documents/PX-20071.html