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Investigations of the ion acoustic affect during focussed ion beam irradiation
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1996
Journal Article
Title
Investigations of the ion acoustic affect during focussed ion beam irradiation
Author(s)
Teichert, J.
Bischoff, L.
Köhler, B.
Journal
Nuclear instruments and methods in physics research, Section B. Beam interactions with materials and atoms
DOI
10.1016/S0168-583X(96)00533-2
Language
English
Fraunhofer-Institut für Zerstörungsfreie Prüfverfahren IZFP
