English
Deutsch
Log In
Password Login
or
Log in with Fraunhofer Smartcard
Research Outputs
Projects
Researchers
Institutes
Statistics
Fraunhofer-Gesellschaft
Home
Fraunhofer-Gesellschaft
Konferenzschrift
Investigations of relaxation effects in Cu-lines on Si-substrates
Details
Full
Export
Statistics
Options
1997
Conference Paper
Titel
Investigations of relaxation effects in Cu-lines on Si-substrates
Author(s)
Köhler, B.
Meissner, O.
Melov, V.G.
Schreiber, J.
Hauptwerk
Micro Materials. Micro Mat '97. Proceedings
Konferenz
Micro Materials (Micro Mat) 1997
Language
English
google-scholar
View Details
Fraunhofer-Institut für Zerstörungsfreie Prüfverfahren IZFP