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Investigation of the ammonia sensitivity of different MOS-transistors

 
: Dobos, K.; Zimmer, G.

Transducers '87. 4th International Conference on Solid-State Sensors and Actuators. Digest of technical papers
1987
ISBN: 4-88686-010-9
pp.652-653 : Lit.
International Conference on Solid-State Sensors and Actuators <4, 1987, Tokyo>
English
Conference Paper
Fraunhofer IMS ()

Abstract
A split gate and a very thin Pt and Pd metal gate MOS-Transistor as an ammonia sensor was developed and investigated. These transistors showed a good ammonia sensitivity. (IMS)

: http://publica.fraunhofer.de/documents/PX-19945.html