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Interferometric measurement of fine-machined surfaces

 
: Spur, G.; Nyarsik, L.; Körner, K.; Krahn, A.

Proceedings of the 2nd French-German Workshop on Optical Measurement Techniques, Fibre Optics and Instrumentation
1992
French-German Workshop on Optical Measurement Techniques, Fibre Optics and Instrumentation <2, 1992, Saint-Etienne>
English
Conference Paper
Fraunhofer IPK ()
feinbearbeitete Oberfläche; fine-machined surface; Formmessung; Interferometrie; interferometry; measurement of form; prism interferometer; Prismeninterferometer; Rauheitsmessung; waviness and roughness; Welligkeitsmessung

Abstract
A possibility for measuring the form, waviness and roughness of fine-machined surfaces by interferometric means is discussed. A variety of fine-machined surfaces shows parameters of hight in the range of microns. So it is necessary to increase the interfermometric increment in a two-beam-interferometer with visible light by grazing incidence illumination. This principle was investigated in a new prism interferometer. A test method for the interferometer is proposed and measurements are represented.

: http://publica.fraunhofer.de/documents/PX-19694.html