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Interference coatings for the ultraviolet spectral region

Dünne Schichten für den ultravioletten Spektralbereich
: Kaiser, N.

Laser und Optoelektronik 28 (1996), No.2, pp.52-60
ISSN: 0722-9003
Journal Article
Fraunhofer IOF ()
Dünne optische Schicht; excimer laser optics; fluoride thin films; Fluoridschicht; laser induced damage threshold; Laserzerstörschwelle; optical coating; optical thin films; oxide thin films; Oxidschicht; ultraviolet spectral region; ultravioletter Spektralbereich; UV

High-performance multilayer coatings for the ultraviolet spectral region that ensure the optical performance required in harsh industrial conditions have been developed. Objective was the enhancement of reliability and availability of complex UV-photon machining and measuring systems. It as been shown that it is possible to adapt the UV-laser beam shape with high efficiency to specific applications by properly designed interference coatings.