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Title
Integrierte Schaltung mit einem ionenempfindlichen Fluessigkeitssensor und einer Referenzelektrode
Date Issued
1992
Author(s)
Hein, P.
Drost, S.
Patent No
1991-4115399
Abstract
A circuit comprises an ion-sensitive sensor and an integrated reference electrode. To permit long life and integration of the reference electrode despite the fact that SOS technology is not used, the integrated circuit is surrounded by a housing provided with a window, the integrated circuit being covered by a protective layer in which the reference electrode is arranged, the reference electrode below the gold layer being a layer made of nickel or nickel chrome, said layer being arranged on the protective layer, the reference electrode being located on the front side of the integrated circuit having a photolithographic structure and extending through to a terminal pad outside the housing window, the integrated circuit being covered by a photopolymer layer with the exception of the contact surfaces of the reference electrode and the active sensor surface of the liquid sensor.
Language
de
Patenprio
DE 1991-4115399 A: 19910510