1997
Conference Paper
Title

Integrated vapor-phase cleaning and pure NO nitridation for gate stack formation

Author(s)
Glowacki, F.
Froeschle, B.
Deutschmann, L.
Sagnes, I.
Laviale, D.
Bensahel, D.
Galimaoui, A.
Martin, F.
Bauer, A.J.
Mainwork
Conference
Language
English