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Integrated surface micromachined pressure sensor for high pressure applications

: Dudaicevs, H.; Hell, S.; Mokwa, W.; Schmidt, M.

Ninth Micromechanics Europe Workshop, MME '98. Proceedings
Oslo: SINTEF, 1998
Workshop on Micromachining, Micromechanics and Microsystems <9, 1998, Ulvik>
Micromechanics Europe (MME) <9, 1998, Ulvik>
Conference Paper
Fraunhofer IMS ()
CMOS-Technik; Drucksensor; Mikromechanik

This paper presents what we believe the first monolithic integrated sensor device ready to fit in industrial high pressure application. The integrated sensor device is fabricated with surface micromachining technology implemented in a 1.5 mu m CMOS technology for producing the readout circuitry. The sensor rages up to 350 bar and is designed to be used in hydraulic control valves or brake systems. The output voltage range is adjustable and optimised for 0.5 V to 4.5 V. Test results show excellent mechanical stability and repeatability and a temperature error about 200ppm/deg C/FS in the range from -20 degC to 80 deg C.