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An integrated sensor for invasive blood velocity measurement


Sensors and Actuators. A 37/38 (1993), pp.674-678 : Lit.
ISSN: 0924-4247
Eurosensors <6, 1992, San Sebastian>
Conference Paper
Fraunhofer IMS ()
blood flow; Blutdurchflußmessung; Blutströmung; catharometer; CMOS process; CMOS-Technik; Durchflußmessung; flow measurement; flow velocity sensor; fluid-flow measurement; Hitzdrahtanimometer; micromechanics; Mikromechanik; silicium; silicon; Strömungsgeschwindigkeitsmessung; Strömungsmessung

Invasive measurements of physical parameters in blood are very important for the intensive care. The integrated flow sensors presented here has been developed as a part of an "intelligent catheter" for measuring certain blood parameters. The sensor is based on the principles of hot-film anemometry. The temperature difference on a chip is measured by two diodes. One diode is heated by means of a polysilicon resistor in close proximity. This diode is (for thermal insulation) placed on a 5 mym x 260 mym x 260 mym silicon membrane. For the membrane formation the implanted oxide layer of SIMOX substrates (Separation by Implanted Oxygen) was used as a stop for backside etching. This technique allows batch processing and is compatible with a standard CMOS process. In addition, electronic CMOS devices can be mounted directly into the membrane. Switched capacitor circuits are used for sensor read-out electronics.