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Inorganic-organic copolymers -ORMOCERs- new materials for microelectronic applications

 
: Popall, M.; Schulz, J.

Hartmann, H.:
ELMAT 91. Materials in Micro Electronics. Tagungsband
Berlin: VDE-Verlag, 1991
pp.1-8 : Abb.,Lit.
Materials in Micro Electronics <1991>
English
Conference Paper
Fraunhofer ISC ()
coating; microelectronic application; ORMOCER; photolithographic method; sol-gel; substrate material

Abstract
Inorganic-organic copolymers (ORMOCERs = ORganically MOdified CERamics), synthesized by sol-gel processing were developed for interconnection technologies, for isolation and passivation layers and as protective coatings for electronic devices. Main features are low permittivity constants, high bulk resistance, high breakthrough voltages, barrier properties and good adhesion to very different substrate materials. Owing to these properties, they are suitable materials for microelectronic applications. They are patternable by photolithographic methods or direct laser writing (frequency doubled Argon-ion laser at 257 nm or at 350 nm).

: http://publica.fraunhofer.de/documents/PX-18975.html