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1997
Conference Paper
Title

Infrared micromirror array with large pixel size and large deflection angle

Abstract
The paper presents a technological study for the realization of micromirrors which have both, a large pixel size (100 mu m*100 mu m) and a large mirror deflection angle (+or-15 degrees ). This specification requires a 13 mu m gap for electrostatic actuation. A metal surface micromachining process has been developed using thick resist UV- lithography, multiple electroplating, a copper sacrificial layer and a polishing process step. Using nonplanar electrodes the driving voltage of electrostatic actuators can be reduced by factors. Two different technologies to realize tapered electrodes are presented.
Author(s)
Wagner, B.
Reimer, K.
Maciossek, A.
Hofmann, U.
Mainwork
Transducers '97. Digest of technical papers  
Conference
International Conference on Solid-State Sensors and Actuators 1997  
DOI
10.1109/SENSOR.1997.613585
Language
English
Fraunhofer-Institut für Siliziumtechnologie ISIT  
Keyword(s)
  • copper

  • electroplating

  • electrostatic device

  • integrated optics

  • lithography

  • microactuator

  • micromachining

  • mirror

  • polishing

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