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Influence of surface resistance on the response of planar capacitive humidity sensors

: Richter, A.; Möller, S.; Obermeier, E.

Eurosensors II. Book of Abstracts
Eurosensors <4, 1988, Enschede>
Conference Paper
Fraunhofer IFT; 2000 dem IZM eingegliedert
Aluminiumoxid; Feuchtefühler; Interdigitalkondensator; Kapazität; Oberflächenleitfähigkeit; RC-Leitung; sensor

The influence of surface conductivity on the response of a surface-type humidity sensor is shown. The measurements are compared with results from a theoretical model, based on distributed RC-transmission lines. Interdigital capacitors were covered with a sputtered aluminiumoxide and a thin (1nm-6nm) gold layer of variable thickness as a humidity sensitive layer. The results are showing clearly the dependence of the humidity sensitivity on the surface resistance of the thin gold film. (IFT)