Publica
Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten. In situ layer characterization by spectroscopic ellipsometry at high temperatures
| Seiler, D.G.; Diebold, C.; Bullis, M.W.; Shaffner, J.; McDonald, R.; Walters, E.J. ; American Institute of Physics -AIP-, New York:
Characterization and metrology for ULSI technology
Woodbury, NY: American Institute of Physics, 1998 (AIP Conference Proceedings 449)
pp.326 |
| International Conference on Characterization and Metrology for ULSI Technology <1998, Gaithersburg/Md.> |
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| English |
| Conference Paper |
| Fraunhofer IIS B ( IISB) () |