English
Deutsch
Log In
Log in with Fraunhofer Smartcard
Password Login
Research Outputs
Fundings & Projects
Researchers
Institutes
Statistics
Fraunhofer-Gesellschaft
Home
Fraunhofer-Gesellschaft
Konferenzschrift
In situ layer characterization by spectroscopic ellipsometry at high temperatures
Details
Full
Export
Statistics
Options
Show all metadata (technical view)
1998
Conference Paper
Title
In situ layer characterization by spectroscopic ellipsometry at high temperatures
Author(s)
Lehnert, W.
Petrik, P.
Schneider, C.
Pfitzner, L.
Ryssel, H.
Mainwork
Characterization and metrology for ULSI technology
Conference
International Conference on Characterization and Metrology for ULSI Technology 1998
Language
English
IIS-B
