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  4. Improved tribilogical properties of sputtered MoSx films by ion beam mixing
 
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1986
Journal Article
Title

Improved tribilogical properties of sputtered MoSx films by ion beam mixing

Abstract
In beam mixing yielded a distinct enhancement in the sliding life of sputtered MoS sub x films without any deterioration of the excellent lubrication properties. This effect occurs only at higher ion energies indicating an improvement film-substrate adherence caused by a mixing of the interface, which was confirmed by secondary ion mass spectrometry and topographical investigations. In addition to that a considerable enhancement of the film density was found due to a reorientation of the MoS sub x platelets which led also to an improvement of the effective film thickness.
Author(s)
Kobs, K.
Dimigen, H.
Huebsch, H.
Tolle, H.J.
Leutenecker, R.
Ryssel, H.
Journal
Applied Physics Letters  
DOI
10.1063/1.97129
Language
English
IIS-B  
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