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Improved tribilogical properties of sputtered MoSx films by ion beam mixing

: Kobs, K.; Dimigen, H.; Huebsch, H.; Tolle, H.J.; Leutenecker, R.; Ryssel, H.


Applied Physics Letters 49 (1986), No.9, pp.496 ff
ISSN: 0003-6951 (Print)
ISSN: 1077-3118
Journal Article
Fraunhofer IIS B ( IISB) ()

In beam mixing yielded a distinct enhancement in the sliding life of sputtered MoS sub x films without any deterioration of the excellent lubrication properties. This effect occurs only at higher ion energies indicating an improvement film-substrate adherence caused by a mixing of the interface, which was confirmed by secondary ion mass spectrometry and topographical investigations. In addition to that a considerable enhancement of the film density was found due to a reorientation of the MoS sub x platelets which led also to an improvement of the effective film thickness.