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  4. Impedance spectroscopy at dielectric gassensors
 
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1990
Conference Paper
Title

Impedance spectroscopy at dielectric gassensors

Title Supplement
Poster 25
Author(s)
Drost, S.
Endres, H.-E.
Hutter, F.
Mainwork
3rd International Meeting on Chemical Sensors '90. Proceedings  
Conference
International Meeting on Chemical Sensors (IMCS) 1990  
Language
English
IFT  
Keyword(s)
  • capacitive gas sensor

  • dielectric gas sensor

  • heteropolysiloxane

  • IDC

  • impedance spectroscopy

  • interdigital capacitor

  • micro system technology

  • SO2

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