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Imaging characteristics of prism interferometers

: Spur, G.; Nyarsik, L.; Körner, K.

Akos, G.; Lippenyi, T. ; International Commission for Optics -ICO-; Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.:
Optics as a key to high technology : 9-13 August 1993, Budapest, Hungary
Bellingham/Wash.: SPIE, 1993 (SPIE Proceedings Series 1983)
ISBN: 0-8194-1230-9
International Commission for Optics (Congress) <16, 1993, Budapest>
Conference Paper
Fraunhofer IPK ()
grazing incidence illumination; Interferometrie; interferometry; measurement; Messung; micro-topography; Mikro-Topographie; prism interferometer; Prismeninterferometer; Schräglichtbeleuchtung; technical surface; technische Oberfläche

The micro topography of technical surfaces was measured with a prism interferometer. A new anamorphic double-module serving as an interference head was designed for this purose. This interference head provides a shear-free-two-beam interference image and allows computer-controlled phase-shifting for phase-sampling methods. The distance between the specimen's surface and the module may exceed 1 mm. A mathematical-physical model for prism interferometers was worked out to properly evaluate the information on the surface which has had been gained by means of interferometric images.