Publica
Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten. Hydrogen content and mechanical stress in glow discharge amorphous silicon
Wasserstoffkonzentration und mechanische Spannung in amorphem Plasmasilizium
| International Conference on Amorphous Systems Investigated by Nuclear Methods '81. Proceedings
1981
pp.1007-1018 : Abb.,Lit. |
| International Conference on Amorphous Systems Investigated by Nuclear Methods <1981, Balatonfüred> |
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| English |
| Conference Paper |
| Fraunhofer IFT; 2000 dem IZM eingegliedert |
| Plasmaabscheidung; Plasmaentladung; Silizium; Wasserstoffgehalt |