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1998
Conference Paper
Titel
Hierarchical mask data preparation and special fracturing techniques in MGS
Abstract
MGS is a layout postprocessor software including a fracturing engine for Leica's ZBA e-beam writers. It is installed in mask shops, fabs, research institutes and universities as the data preparation software for ZBA tools. With the ZBA series including the new ZBA300 and its ability to write submicrometer mask for advanced technologies two main tasks have to be mastered in data preparation: 1. Processing of large and dense layouts, 2. Contribution to increased mask quality by optimizes fracturing. These challenges are not restricted to the ZBA tolls only; on the contrary they are of general interest for data preparation.
Language
English