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Heating and temperatur induced distortions of silicon X-ray masks
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1983
Conference Paper
Titel
Heating and temperatur induced distortions of silicon X-ray masks
Author(s)
Heinrich, H.
Betz, H.
Heuberger, A.
Hauptwerk
Microcircuit Engineering '83. International Conference on Microlithography
Konferenz
International Conference on Microlithography 1983
Language
English
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IFT
Tags
Lithographie
Maske
Röntgenstrahlen
Temperatureffekt