Hard amorphous carbon films

: Schultrich, B.; Scheibe, H.J.

Abstract
Amorphous carbon with a diamond-like structure is the basis of a new generation of hard films for tribological applications. In the paper the deposition condition of hydrogen containing and hydrogenfree amorphous carbon films are discused and compared with those of polycristalline diamond films. Especially, advantages of new pulsed vacuum arc evaporation for the deposition of hydrogenfree amorphous carbon films are discused. Results of mechanical and tribological studies of such films are presented. Recent and potential application possibilities are discussed