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Graded reflectance mirror design with unconventional profile for excimer laser

: Kaiser, N.; Schallenberg, U.; Uhlig, H.


Journal of the European Optical Society. Part A, Pure and applied optics 3 (1994), pp.427-434
ISSN: 0963-9659
Journal Article
Fraunhofer IOF ()
Dünne optische Schicht; excimer laser optics; fluoride thin films; Fluoridschicht; laser induced damage threshold; Laserzerstörschwelle; optical coating; optical thin films; oxide thin films; Oxidschicht; ultraviolet spectral region; ultravioletter Spektralbereich; UV

The design of a graded-reflectance mirror (GRM) for KrF-excimer laser has been developed. The mirror consists of three areas of reflectance: (1) a rectangular area in the middle of the substrate with a reflectance R1 about 10 per cent, (2) an outer area with a reflectance R2 about 95 per cent, and (3) a transition area with a defined reflectance increase from R1 to R2. The sandwich type was used to design the GRM with two layers of variable thicknesses and a total of 19 layers. The variable thickness based on the shadowing effect of a fixed non-contact mask with rectangular aperture. For excimer laser applications in particular, the electric field distribution inside the layer system was investigated.