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Glass transition temperature and thermal expansion behaviour of polymer films investigated by variable temperature spectroscopic ellipsometry

: Kahle, O.; Wielsch, U.; Metzner, H.; Bauer, J.; Uhlig, C.; Zawatzki, C.

Collins, R.W.:
Spectroscopic ellipsometry. Proceedings of the 2nd International Conference on Spectroscopic Ellipsometry 1997
Amsterdam: Elsevier, 1998 (Thin solid films 313-314)
International Conference on Spectroscopic Ellipsometry (ICSE) <2, 1997, Charleston/SC>
Conference Paper
Fraunhofer IZM, Einrichtung Polymermaterialien und Composite ( PYCO) ()
annealing; ellipsometry; glass transition; optical constants; polymer film; thermal expansion

We report investigations of the glass transition temperature and the thermal expansion behaviour of 25-10- mu m thick PMMA films coated on Si wafers. A spectroscopic ellipsometer equipped with an oven, temperature control and data analysis fully integrated into the ellipsometer software was used. For films above 50 nm we found within experimental error the same Tg and thermal expansion behaviour of the PMMA films. Deviations found for thinner PMMA films on Si are attributed to the temperature dependence of the optical properties of the Si-substrate.