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Glass ceramics assemblies for astronomy, lithography and precision mechanics

: Risse, S.; Damm, C.; Peschel, T.

McKeown, P. ; European Society for Precision Engineering and Nanotechnology -EUSPEN-:
Precision Engineering - Nanotechnology. Proceedings of the 1st International EUSPEN Conference. Vol.1
Aachen: Shaker, 1999 (Berichte aus der Fertigungstechnik)
ISBN: 3-8265-6085-X
European Society for Precision Engineering and Nanotechnology (International Conference and General Meeting) <1, 1999, Bremen>
Conference Paper
Fraunhofer IOF ()

Many modern precision mechanical systems demand position tolerances in the submicrometer and seconds of arc ranges, respectively. By three examples, chosen from different fields of application, we demonstrate how these requirements can be fulfilled by the application of glass ceramics in combination with new, in particular optical, technologies.