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Germanium extremely heavily doped by Ion-implantation and laser annealing - A photoluminescence study

 

Fan, J.C. ; Materials Research Society -MRS-:
Energy beam-solid interactions and transient thermal processing. Symposium : Symposium held November 1983 in Boston, Massachusetts, USA
New York: North-Holland, 1984 (Materials Research Society symposia proceedings 23)
ISBN: 0-444-00903-5
pp.147-152
Materials Research Society (Symposium) <1983, Boston/Mass.>
English
Conference Paper
Fraunhofer IAF ()
hochdotiertes Germanium; Ionenimplantation; Laserausheilung

: http://publica.fraunhofer.de/documents/PX-16004.html