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  4. Germanium extremely heavily doped by Ion-implantation and laser annealing - A photoluminescence study
 
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1984
Conference Paper
Title

Germanium extremely heavily doped by Ion-implantation and laser annealing - A photoluminescence study

Author(s)
Axmann, A.
Contreras, G.
Compaan, A.
Cardona, M.
Wagner, J.
Mainwork
Energy beam-solid interactions and transient thermal processing. Symposium  
Conference
Materials Research Society (Symposium) 1983  
Language
English
Fraunhofer-Institut für Angewandte Festkörperphysik IAF  
Keyword(s)
  • hochdotiertes Germanium

  • Ionenimplantation

  • Laserausheilung

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