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Germanium extremely heavily doped by Ion-implantation and laser annealing - A photoluminescence study
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1984
Conference Paper
Title
Germanium extremely heavily doped by Ion-implantation and laser annealing - A photoluminescence study
Author(s)
Axmann, A.
Contreras, G.
Compaan, A.
Cardona, M.
Wagner, J.
Mainwork
Energy beam-solid interactions and transient thermal processing. Symposium
Conference
Materials Research Society (Symposium) 1983
Language
English
Fraunhofer-Institut für Angewandte Festkörperphysik IAF
Keyword(s)
hochdotiertes Germanium
Ionenimplantation
Laserausheilung