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  4. Gassensitive MOSFETs with an adsorbing dielectric layer
 
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1991
Conference Paper
Title

Gassensitive MOSFETs with an adsorbing dielectric layer

Abstract
MOSFETs are widely used elements in the development of gassensors. Besides MOSFETs with palladium for the gate metallization also other structures find attention. In this paper results of the combination of a MOSFET with a gasadsorbing dielectric layer are presented. The material of this layer are heteropolysiloxanes, which were already used for gassensitive interdigital capacitors.
Author(s)
Drath, E.
Drost, S.
Endres, H.-E.
Mainwork
Eurosensors V. Book of Abstracts  
Conference
Eurosensors 1991  
Language
English
IFT  
Keyword(s)
  • dielectric layer

  • dielektrische Schicht

  • gassensor

  • MOSFET

  • SO2-sensor

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