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Gassensitive MOSFETs with an adsorbing dielectric layer

: Drath, E.; Drost, S.; Endres, H.-E.

Consiglio Nazionale delle Ricerche -CNR-, San Michele all'Adige:
Eurosensors V. Book of Abstracts
San Michele all'Adige, 1991
Eurosensors <5, 1991, Rom>
Conference Paper
Fraunhofer IFT; 2000 dem IZM eingegliedert
dielectric layer; dielektrische Schicht; gassensor; MOSFET; SO2-sensor

MOSFETs are widely used elements in the development of gassensors. Besides MOSFETs with palladium for the gate metallization also other structures find attention. In this paper results of the combination of a MOSFET with a gasadsorbing dielectric layer are presented. The material of this layer are heteropolysiloxanes, which were already used for gassensitive interdigital capacitors.