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Title
Gasentladungsanordnung
Date Issued
1991
Author(s)
Patent No
1989-3923277
Abstract
Gas discharge system, with a gas discharge tube containing especially laser gas in a cylindrical cavity, with a tube-shaped housing surrounding the cylindrical cavity at a distance, and with a microwave transmitter whose microwaves can be coupled to the metallic housing to excite the gas electrically. In order to also facilitate homogeneous plasma formation, if a gas flow does not occur or it is only laminar, the gas discharge system is designed so that there is a distance stabilizing the gas discharge between the inner wall of the housing and the cavity forming the gas discharge tube. When air flows in the direction of the strongest field components of the microwaves, this distance is greater than the largest free diameter of the cavity infiltrated by the microwaves.
Language
de
Institute
Patenprio
DE 1989-3923277 A: 19890714