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A gas sensor system with dielectric and mass sensors

: Drost, S.; Endres, H.-E.; Hutter, F.; Kößlinger, C.; Mickle, C.D.

Consiglio Nazionale delle Ricerche -CNR-, San Michele all'Adige:
Eurosensors V. Book of Abstracts
San Michele all'Adige, 1991
Eurosensors <5, 1991, Rom>
Conference Paper
Fraunhofer IFT; 2000 dem IZM eingegliedert
chemical sensor; dielectric sensor; gassensor; mass sensor; Mikrosystem; quartz micro balance; sensor array; SO2

Commonly chemical sensors use only a single physical property of their sensitive material, e.g. interdigital capacitors (IDC) the permittivity. For this gas sensor-system we exploit the physical properties of the sensitive material. The sensitive material of adsorptive dielectric gas sensors changes other properties under the influence of gases too: An alteration of the mass and the optical properties (IR- absorption) under the influence of gases was observed at the sensitive material (heteropolysiloxane, HPS) of dielectric S02-sensors with conventional analytical methods. A direct comparison of the dielectric and mass adsorption isotherm of S02 was practiced with a dielectric sensor (IDC) and a mass sensor (10 MHz bulk-waveoscillator) . The two adsorption isotherms show significant differences. The dielectric adsorption isotherm reaches its saturation point at a lower S02 concentration than the mass adsorption isotherm. In a sensor system this effect could be used for an exact determi nation of the saturation point. Further characteristics of this sensors and a proposal for an physical sensor system will be discussed.