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  4. Gas-sensitive MOSFETs - an overview
 
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1991
Conference Paper
Title

Gas-sensitive MOSFETs - an overview

Other Title
Gassensitive MODFET's - ein Überblick
Abstract
Gas sensors find increasing attention because of the large number of applications and the disadvantages of conventional solutions for the measurement of gases. Therefore many research teams develop oas sensors on the basis of MOSFETs. Besides the well-known MOSFETs with palladium gate electrodes for the detection of hydrogen, a number of other MOSFET-structures using dielectric layers are also developed. These MOSFETs, which are described in the literature, are classified in five types according to the position of the gate electrode to the sensitive layer. As an example a MOSFET gas sensor with gate electrodes parallel to the drain current and heteropolysiloxanes as the sensitive layer for SO2 is presented.
Author(s)
Drost, S.
Endres, H.-E.
Mainwork
Micro System Technologies '91  
Conference
Micro Systems Technologies 1991  
Language
English
IFT  
Keyword(s)
  • chemical sensor

  • chemischer Sensor

  • dielectric layer

  • gas sensor

  • gassensor

  • MOSFET

  • overview

  • SO2

  • Überblick

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