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Gas-sensitive MOSFETs - an overview

Gassensitive MODFET's - ein Überblick
: Drost, S.; Endres, H.-E.

Krahn, R.; Reichl, H. ; Ausstellungs-, Messe-, Kongreß-GmbH -AMK-, Berlin:
Micro System Technologies '91
Berlin: VDE-Verlag, 1991
ISBN: 3-8007-1819-7
Micro Systems Technologies <1991, Berlin>
Conference Paper
Fraunhofer IFT; 2000 dem IZM eingegliedert
chemical sensor; chemischer Sensor; dielectric layer; gas sensor; gassensor; MOSFET; overview; SO2; Überblick

Gas sensors find increasing attention because of the large number of applications and the disadvantages of conventional solutions for the measurement of gases. Therefore many research teams develop oas sensors on the basis of MOSFETs. Besides the well-known MOSFETs with palladium gate electrodes for the detection of hydrogen, a number of other MOSFET-structures using dielectric layers are also developed. These MOSFETs, which are described in the literature, are classified in five types according to the position of the gate electrode to the sensitive layer. As an example a MOSFET gas sensor with gate electrodes parallel to the drain current and heteropolysiloxanes as the sensitive layer for SO2 is presented.